(Redirected from TDMAGe)
English
Abbreviation
TDMGe or Tetrakis-Dimethylamino-Germane
- the metalorganic source for Germanium Nitride (GeN) in MOCVD of semiconductors. It grows GeN instead of Ge, and is used at either high temperatures (600-800 C) or with plasma because of its very low vapor pressure and higher decomposition temperature. Also known as TDMAGe and pronounced as T-Damage.